Investor Relations $ Company ) Locations Products ) Thin Film Equipment Photonics Support Careers Investors Contact ) Thin Film Equipment Photonics Investor Relations L News & Events Press Releases Events & Presentations 9 Stock Information Stock Chart Analyst Coverage Ownership Profile 9 Financials / SEC Filings SEC Filings Annual Reports Financial Document Library Key Ratios 9 Corporate Governance Corporate Governance Management Board of Directors Committee Composition 9 Shareholder Resources Email Alerts Contact Us 9 Q L Home News & Events Press Releases Events & Presentations 9 Stock Information Stock Chart Analyst Coverage Ownership Profile 9 Financials / SEC Filings SEC Filings Annual Reports Financial Document Library Key Ratios 9 Corporate Governance Corporate Governance Management Board of Directors Committee Composition 9 Shareholder Resources Email Alerts Contact Us 9 SEC Filings Annual Reports Financial Document Library Key Ratios US SEC Filings All Years 20202019201820172016201520142013201220112010200920082007200620052004200320022001200019991998199719961995 All Forms Annual ReportProxiesQuarterly ReportsInsider Trading8-KOther Filings Description Filing Period Downloads SC 13G/A Amended Statement of Ownership Jan 23, 2020 « 1 2 3 4 » Loading...
